MetroChip calibration standard

The MetroChip microscope calibration standard provides an extensive range of features for SEM, FIB, AFM, light microscopy and metrology systems calibration. It is supplied on a 20 x 20mm chip with a thickness of 750µm, with periodic features for enhanced calibration in the range 4mm down to 100nm.

• Suitable for light microscopy, SEM, FIB, AFM and other metrology systems
• Large range of calibration, from a 4mm ruler down to 100nm geometrics
• Large array of features in both positive and negative structures
• 150nm feature depth with 90° wall angles
• Ease of navigation with dimension labels on most features
• High contrast images in Analytical SEM
• Minimal Charging
• Long Sample Life
• Sample size is 20 x 20mm
• Sample thickness is approximately 750 microns
• The finished product has patterns of etched polycrystalline silicon over a thin oxide on silicon substrate
• Polysilicon thickness is 150nm ±10%
• Oxide thickness under the polysilicon features is less than 5nm, typically 2.5 to 3nm

The MetroChip can also be used for AFM and light microscopy and includes a number of features to check linearity, distortion and scan length.

The SEM calibration feature includes alignment marks, linear microscale, distortion measurements, paraxial calibration (image shift), resolution measurements, focus star, stigmator calibration, gratings, and concentric circles and squares. The combination of these features on one standard makes the MetroChip ideal as an all-in-one standard both for initial setup and regular calibration checks. Due to its composition, the chip exhibits minimal charging and, if cared for properly, a long sample life.

The MetroChip standard is easy to navigate and comes with dimension labels on most features. It is fully traceable to NIST certification.